Alexander Kutyrev
3A.5 - "Programmable Microshutter Arrays: to the James Webb Space Telescope and Beyond"
NASA - Sciences and Exploration Directorate
USA
Invited Speaker Abstract: We are developing fully electrostatic 2D programmable MEMS field masks for the visible/UV multi-object spectroscopy NASA astrophysics missions. The devices have their legacy in the JWST microshutter NIRSpec magnetically actuated microshutter arrays. A new fabrication process has been developed to actuate microshutter arrays electrostatically thus eliminating the need for the macroscopic mechanisms and to improve the reliability and robustness of the device. The microshutters, made with silicon nitride membranes with a pixel size of 100 x 200 μm2, suspended on torsion bars. The microshutters are actuated, latched, and addressed electrostatically by applying voltages on the electrodes the front and back sides of the microshutters. We have successfully fabricated and demonstrated actuation and addressing of these devices.