Wouter Westerveld

Wouter Westerveld

2B.5 - "Optomechanical Ultrasound Sensors in Silicon Photonic Technology"

Delft University of Technology

Netherlands Netherlands

Invited Speaker Abstract: We present a highly sensitive opto-mechanical ultrasound sensor (OMUS) with an innovative silicon photonic split-rib waveguide that features a 15-nm gap between movable parts. This sensor was fabricated using CMOS-compatible processing, has a detection limit that is two orders of magnitude better than piezoelectric sensors of identical size, and was further tested in photoacoustic imaging.

SPEAKER


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